涂层设备

Filtered Cathodic Vacuum Arc

• FCVA is based on Cathodic Vacuum Arc 

• Especially, it has a bent duct and electromagnetic coils 

     between cathode and workpiece in order to deposit smooth coatings

• Effective area : Φ450 x H400 

• Deposition rate, 0.15 um/h per cathode with double rotation 

• Etching source : Ion Gun •Buffer layer source : Sputter

• H Free DLC : FCVA gun x 4

• Pumping : R/P+MBP+Turbo Pump ~10^-5 torr 

• Heater : <250℃

ta-C Coating 

●  Tetrahedral amorphous Carbon

●  Hydrogen free coating

●  Higher sp3(diamond) bonding

●  Hardest coating of DLC ,<80GPa   (HV2,000~7,000)

●  Thermal stability ,<500℃ 

●  Low friction, 0.2@dry

●  Typical thickness :  <1um for tools , 1~10um for auto. parts